The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2013
Filed:
Aug. 10, 2012
Faysal Boughorbel, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Berend Helmerus Lich, Weert, NL;
Alan Frank DE Jong, Eindhoven, NL;
Faysal Boughorbel, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Cornelis Sander Kooijman, Veldhoven, NL;
Berend Helmerus Lich, Weert, NL;
Alan Frank de Jong, Eindhoven, NL;
FEI Company, Hillsboro, OR (US);
Abstract
A charged-particle microscopy includes irradiating a sample in measurement sessions, each having an associated beam parameter (P) value detecting radiation emitted during each measurement session, associating a measurand (M) with each measurement session, thus providing a data set (S) of data pairs {P, M}, wherein an integer in the range of 1≦n≦N, and processing the set (S) by: defining a Point Spread Function (K) having a kernel value Kfor each value n; defining a spatial variable (V); defining an imaging quantity (Q) having fore each value of n a value Qthat is a three-dimensional convolution of Kand V, such that Q=K*V; for each value of n, determining a minimum divergence min D(M∥K*V) between Mand Q, solving V while applying constraints on the values K.