The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2013
Filed:
Jul. 26, 2011
Chan-lon Yang, Taipei, TW;
Tzu-feng Kuo, Hsinchu, TW;
Hsin-huei Wu, Chiayi, TW;
Ching-i LI, Tainan, TW;
Shu-yen Chan, Changhua County, TW;
Chan-Lon Yang, Taipei, TW;
Tzu-Feng Kuo, Hsinchu, TW;
Hsin-Huei Wu, Chiayi, TW;
Ching-I Li, Tainan, TW;
Shu-Yen Chan, Changhua County, TW;
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Abstract
A semiconductor device includes a plurality of active areas disposed on a semiconductor substrate. A manufacturing method of the semiconductor device includes performing a first annealing process on the semiconductor substrate by emitting a first laser alone a first scanning direction, and performing a second annealing process on the semiconductor substrate by emitting a second laser alone a second scanning direction. The first scanning direction and the second scanning direction have an included angle.