The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Sep. 10, 2008
David P. Bour, Cupertino, CA (US);
Christopher L. Chua, San Jose, CA (US);
Zhihong Yang, Sunnyvale, CA (US);
David P. Bour, Cupertino, CA (US);
Christopher L. Chua, San Jose, CA (US);
Zhihong Yang, Sunnyvale, CA (US);
Palo Alto Research Center Incorporated, Palo Alto, CA (US);
Abstract
One disclosed feature of the embodiments is a control processor in a vapor delivery system for chemical vapor deposition precursors. A pressurization rate processor calculates first and second pressurization rate curves at first and second time instants. A volume calculator computes consumed volume based on first and second volumes at the respective first and second time instants. The first and second volumes are computed using slopes of lines fitting the first and second pressurization rate curves.