The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 29, 2013
Filed:
Dec. 10, 2008
Yasushi Akiyama, Kakegawa, JP;
Go Noya, Kakegawa, JP;
Katsutoshi Kuramoto, Kawaguchi, JP;
Yusuke Takano, Kakegawa, JP;
Yasushi Akiyama, Kakegawa, JP;
Go Noya, Kakegawa, JP;
Katsutoshi Kuramoto, Kawaguchi, JP;
Yusuke Takano, Kakegawa, JP;
Electronic Materials USA Corp., Somerville, NJ (US);
Abstract
Disclosed is a composition for forming a top antireflective film, which comprises at least one fluorine-containing compound and a quaternary ammonium compound represented by the formula (1) [wherein at least one of R, R, R, and Rrepresents a hydroxyl group or an alkanol group, and the others independently represent a hydrogen or an alkyl group having 1 to 10 carbon atoms; and Xrepresents a hydroxyl group, a halide ion or a sulfate ion], and optionally a water-soluble polymer, an acid, a surfactant and an aqueous solvent. The composition for forming a top antireflective film can exhibit the same levels of functions as those of conventional top antireflective film-forming compositions when applied in a smaller amount.