The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 22, 2013
Filed:
Mar. 14, 2012
Isaac Mazor, Haifa, IL;
Matthew Wormington, Littleton, CO (US);
Ayelet Dag, Haifa, IL;
Bagrat Khachatryan, Haifa, IL;
Isaac Mazor, Haifa, IL;
Matthew Wormington, Littleton, CO (US);
Ayelet Dag, Haifa, IL;
Bagrat Khachatryan, Haifa, IL;
Jordan Valley Semiconductors Ltd., Migdal Haemek, IL;
Abstract
Apparatus for inspection of a sample includes an X-ray source, which is configured to irradiate a location on the sample with a beam of X-rays. An X-ray detector is configured to receive the X-rays that are scattered from the sample and to output a first signal indicative of the received X-rays. A VUV source is configured to irradiate the location on the sample with a beam of VUV radiation. A VUV detector is configured to receive the VUV radiation that is reflected from the sample and to output a second signal indicative of the received VUV radiation. A processor is configured to process the first and second signals in order to measure a property of the sample.