The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Sep. 14, 2010
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Nicolaas Ten Kate, Almkerk, NL;
Laurentius Johannes Adrianus Van Bokhoven, Veldhoven, NL;
Henricus Jozef Castelijns, Bladel, NL;
Raymond Wilhelmus Louis Lafarre, Helmond, NL;
Nicolaas Ten Kate, Almkerk, NL;
Laurentius Johannes Adrianus Van Bokhoven, Veldhoven, NL;
Henricus Jozef Castelijns, Bladel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus, including a substrate table configured to hold a substrate; a positioner configured to position the substrate table relative to a projection system, the positioner including a short stroke module configured to perform fine positioning movements, on which the substrate table is held and which is supported on a long stroke module configured to perform coarse positioning movements; and a coverplate configured to at least partly cover a top surface of the short stroke module; wherein the coverplate is mounted to the long stroke module.