The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Nov. 11, 2008
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Joost DE Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
Hans Butler, Best, NL;
Marc Wilhelmus Maria Van Der Wijst, Veldhoven, NL;
Johan Hendrik Geerke, Eindhoven, NL;
Joost De Pee, Veldhoven, NL;
Clementius Andreas Johannes Beijers, Eindhoven, NL;
Marco Hendrikus Hermanus Oude Nijhuis, Eindhoven, NL;
Francois Xavier Debiesme, Weert, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A vibration damping arrangement for a lithographic apparatus includes a sensor arranged to, in use, detect a vibration of a projection system. An actuator is arranged to, in use, exert a force on a control unit of the projection system to convert an output signal of the sensor to an actuator input signal such that, during operation, the vibration of the projection system is mitigated by controlling the actuator by the input signal to exert the force to the projection system.