The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2013
Filed:
Apr. 16, 2008
Koji Ishino, Odawara, JP;
Hajime Nakamura, Naka-gun, JP;
Mayako Matsuda, Chigasaki, JP;
Takaaki Shindou, Ebina, JP;
Yukio Kikuchi, Chigasaki, JP;
Koji Ishino, Odawara, JP;
Hajime Nakamura, Naka-gun, JP;
Mayako Matsuda, Chigasaki, JP;
Takaaki Shindou, Ebina, JP;
Yukio Kikuchi, Chigasaki, JP;
ULVAC, Inc., Chigasaki-Shi, JP;
Abstract
A supporting member, carrier and method of supporting are provided with a supporting member main body mounted to freely rotate. The supporting member main body is provided with a plurality of projections extending radially from a central rotation axis. Since the substrate is supported by abutment of the projections with an end of the substrate, the occurrence of cracking in the substrate can be prevented or the durability of the supporting member main body can be increased.