The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2013
Filed:
Jan. 17, 2012
Applicants:
Roy E. Scheuerlein, Cupertino, CA (US);
Alper Ilkbahar, San Jose, CA (US);
April D. Schricker, Palo Alto, CA (US);
Inventors:
Roy E. Scheuerlein, Cupertino, CA (US);
Alper Ilkbahar, San Jose, CA (US);
April D. Schricker, Palo Alto, CA (US);
Assignee:
SanDisk 3D LLC, Milpitas, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/06 (2006.01); H01L 29/02 (2006.01); G11C 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In accordance with aspects of the invention, a method of forming a metal-insulator-metal stack is provided. The method includes forming a first conducting layer, forming a resistivity-switching carbon-based material above the first conducting layer, and forming a second conducting layer above the carbon-based material, wherein the carbon-based material has a thickness of not more than ten atomic layers. Other aspects are also described.