The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2013
Filed:
Sep. 08, 2012
Applicants:
Dmitri Lapanik, Kanagawa, JP;
Shohei Matsushita, Kanagawa, JP;
Takashi Mitsuhashi, Kanagawa, JP;
Zhigang Wu, Kanagawa, JP;
Inventors:
Dmitri Lapanik, Kanagawa, JP;
Shohei Matsushita, Kanagawa, JP;
Takashi Mitsuhashi, Kanagawa, JP;
Zhigang Wu, Kanagawa, JP;
Assignee:
D2S, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
Abstract
Various embodiments of the present invention relate to particle beam writing to fabricate an integrated circuit on a wafer. In various embodiments, cell projection (CP) cell library information is stored in the form of a data structure. Subsequently, the CP cell library information is referenced by a writing system. The patterns are written on the wafer depending on the referenced CP cell library.