The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 10, 2013

Filed:

Dec. 17, 2010
Applicants:

Luisa D. Bozano, Los Gatos, CA (US);

Gregory Breyta, San Jose, CA (US);

Ekmini A. Desilva, Ossining, NY (US);

William D. Hinsberg, Fremont, CA (US);

Ratnam Sooriyakumaran, San Jose, CA (US);

Linda K. Sundberg, Los Gatos, CA (US);

Inventors:

Luisa D. Bozano, Los Gatos, CA (US);

Gregory Breyta, San Jose, CA (US);

Ekmini A. DeSilva, Ossining, NY (US);

William D. Hinsberg, Fremont, CA (US);

Ratnam Sooriyakumaran, San Jose, CA (US);

Linda K. Sundberg, Los Gatos, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/30 (2006.01); G03F 7/38 (2006.01);
U.S. Cl.
CPC ...
Abstract

Phenolic molecular glasses such as calixarenes include at least one fluoroalcohol containing unit. The fluoroalcohol containing molecular glasses can be used in photoresist compositions. Also disclosed are processes for generating a resist image on a substrate using the photoresist composition.


Find Patent Forward Citations

Loading…