The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Dec. 20, 2010
Applicants:
Katsuhiko Nakai, Yamaguchi, JP;
Masamichi Ohkubo, Yamaguchi, JP;
Inventors:
Katsuhiko Nakai, Yamaguchi, JP;
Masamichi Ohkubo, Yamaguchi, JP;
Assignee:
Siltronic AG, Munich, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/322 (2006.01); H01L 29/32 (2006.01); C30B 15/00 (2006.01); C30B 15/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
Silicon wafers doped with nitrogen, hydrogen and carbon, have a plurality of voids, wherein 50% or more of the total number of voids are bubble-like shaped aggregates of voids;