The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
May. 19, 2009
Yasuhiro Tobe, Sendai, JP;
Satoru Kawakami, Sendai, JP;
Shinji Matsubayashi, Sendai, JP;
Yosuke Muraguchi, Ise, JP;
Yasuyoshi Kitazawa, Toyohashi, JP;
Yasumichi Mieno, Toyohashi, JP;
Yasuhiro Tobe, Sendai, JP;
Satoru Kawakami, Sendai, JP;
Shinji Matsubayashi, Sendai, JP;
Yosuke Muraguchi, Ise, JP;
Yasuyoshi Kitazawa, Toyohashi, JP;
Yasumichi Mieno, Toyohashi, JP;
Tokyo Electron Limited, , JP;
Abstract
An object is to provide a vacuum processing apparatus that is capable of suppressing the costs and making control easy. Provided is a vacuum processing apparatus that includes a vacuum section () of which inside is held in vacuum, a placing section () that is disposed inside the vacuum section () and is capable of placing a workpiece thereon, a linear motor) that includes coils () and makes the placing section () travel within the vacuum section, wherein air is placed inside the placing section () while being isolated from the vacuum section (), and the coils () of the linear motor () are disposed inside the placing section ().