The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2013
Filed:
Dec. 18, 2006
Erik M. Freer, Campbell, CA (US);
John M. Delarios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Mikhail Korolik, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Erik M. Freer, Campbell, CA (US);
John M. deLarios, Palo Alto, CA (US);
Katrina Mikhaylichenko, San Jose, CA (US);
Michael Ravkin, Sunnyvale, CA (US);
Mikhail Korolik, San Jose, CA (US);
Fred C. Redeker, Fremont, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for cleaning a substrate is provided. The method initiates with disposing a fluid layer having solid components therein to a surface of the substrate. A shear force directed substantially parallel to the surface of the substrate and toward an outer edge of the substrate is then created. The shear force may result from a normal or tangential component of a force applied to a solid body in contact with the fluid layer in one embodiment. The surface of the substrate is rinsed to remove the fluid layer. A cleaning system and apparatus are also provided.