The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Jul. 28, 2011
Tsuyoshi Yoshimoto, Chigasaki, JP;
Katsumi Yamane, Chigasaki, JP;
Tetsuhiro Ohno, Chigasaki, JP;
Takahiro Mizoguchi, Chigasaki, JP;
Tsuyoshi Yoshimoto, Chigasaki, JP;
Katsumi Yamane, Chigasaki, JP;
Tetsuhiro Ohno, Chigasaki, JP;
Takahiro Mizoguchi, Chigasaki, JP;
Ulvac, Inc., Chigasaki-shi, JP;
Abstract
A technology to control temperature of a large substrate to be heated. A temperature sensing device is disposed lateral to a region where a radiation heater faces a substrate to be heated inside a heating chamber. A heating device has the heating chamber, the radiation heater, a power-supply device, a substrate-holding device, a control device, and the temperature sensing device. A control program is built into the control device, according to which the power-supply device controls the power applied to the radiation heater to generate heat such that the temperature of the temperature measurement substrate detected by a thermocouple of the temperature sensing device becomes a set temperature. Furthermore, a circulation passage is disposed in close contact with the temperature-sensing device, and with a coolant flowing through the circulation passage, the temperature of the temperature measurement substrate can be cooled from the set temperature to an initial temperature.