The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Nov. 08, 2011
Applicants:
Frederic Anthony Schraub, San Luis Obispo, CA (US);
Michael R. Vogtmann, San Luis Obispo, CA (US);
Benjamin C. Smedley, San Luis Obispo, CA (US);
Inventors:
Frederic Anthony Schraub, San Luis Obispo, CA (US);
Michael R. Vogtmann, San Luis Obispo, CA (US);
Benjamin C. Smedley, San Luis Obispo, CA (US);
Assignee:
Strasbaugh, San Luis Obispo, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/28 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system for holding non-contact wafer probes over the surface of a wafer which includes a system for flushing the surface of the probe during grinding.