The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2013
Filed:
Dec. 16, 2011
J. Albert Schultz, Houston, TX (US);
Thomas F. Egan, Houston, TX (US);
Steven R. Ulrich, Houston, TX (US);
Kelley L. Waters, Houston, TX (US);
J. Albert Schultz, Houston, TX (US);
Thomas F. Egan, Houston, TX (US);
Steven R. Ulrich, Houston, TX (US);
Kelley L. Waters, Houston, TX (US);
Ionwerks, Inc., Houston, TX (US);
Abstract
The present invent provides a particle detector for counting and measuring the flight time of secondary electrons and scattered ions and neutrals and to correlate coincidences between these and backscattered ions/and neutrals while maintaining a continuous unpulsed microfocused primary ion beam for impinging a surface. Intensities of the primary particle scattering and secondary particle emissions are correlated with the position of impact of the focused beam onto a materials surface so that a spatially resolved surface elemental and electronic structural mapping is obtained by scanning the focused beam across the surface.