The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Nov. 03, 2010
Alexander I. Ershov, Escondido, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Norbert R. Bowering, Bielefeld, DE;
Jerzy R. Hoffman, Montebello, CA (US);
Alexander I. Ershov, Escondido, CA (US);
Igor V. Fomenkov, San Diego, CA (US);
Norbert R. Bowering, Bielefeld, DE;
Jerzy R. Hoffman, Montebello, CA (US);
Cymer LLC, San Diego, CA (US);
Abstract
A device comprising a laser source producing a continuous output on a beam path and an amplifier is disclosed. The device further includes a partially transmissive, partially reflective optic disposed on said beam path between said laser source and said amplifier. The device further includes a droplet generator positioned to deliver a droplet moving on a path intersecting said beam path, the droplet reflecting light to establish an optical cavity with said optic.