The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Jul. 28, 2010
Shigenobu Maruyama, Oiso, JP;
Toshifumi Honda, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Yuta Urano, Yokohama, JP;
Shigenobu Maruyama, Oiso, JP;
Toshifumi Honda, Yokohama, JP;
Toshiyuki Nakao, Yokohama, JP;
Yuta Urano, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In order to maximize the effect of signal addition during inspection of foreign substances in wafers, a device structure including line sensors arranged in plural directions is effective. Low-angle detection optical systems that detect light beams in plural azimuth directions, the light beams being scattered in low angle directions among those scattered from a linear area on a sample illuminated by illuminating means, each include a combination of a first imaging lens group () and a diffraction grating () and a combination of a second imaging lens group () and an image detector () having a plurality of light receiving surfaces. A signal processing unit processes signals from the image detectors of the low-angle detection optical systems by adding the signals from the light receiving surfaces corresponding between the image detectors.