The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 20, 2013
Filed:
Sep. 23, 2010
Masafumi Muramatsu, Kanagawa, JP;
Kazumi Asada, Kanagawa, JP;
Yukino Hagino, Kanagawa, JP;
Atsushi Okuyama, Kanagawa, JP;
Takahito Nakajima, Yokkaichi, JP;
Kazuhiko Takase, Yokohama, JP;
Yoshihiro Uozumi, Yokohama, JP;
Tsuyoshi Matsumura, Hiratsuka, JP;
Takuo Ohwada, Tokyo, JP;
Norio Ishikawa, Soka, JP;
Masafumi Muramatsu, Kanagawa, JP;
Kazumi Asada, Kanagawa, JP;
Yukino Hagino, Kanagawa, JP;
Atsushi Okuyama, Kanagawa, JP;
Takahito Nakajima, Yokkaichi, JP;
Kazuhiko Takase, Yokohama, JP;
Yoshihiro Uozumi, Yokohama, JP;
Tsuyoshi Matsumura, Hiratsuka, JP;
Takuo Ohwada, Tokyo, JP;
Norio Ishikawa, Soka, JP;
Sony Corporation, Tokyo, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Kanto Kagaku Kabushiki Kaisha, Tokyo, JP;
Abstract
A post-dry etching cleaning liquid composition for cleaning a substrate after dry etching is provided, the cleaning liquid composition containing at least one type of fluorine compound, glyoxylic acid, at least one type of organic acid salt, and water. With regard to the fluorine compound, ammonium fluoride may be used. With regard to the organic acid salt, at least one of ammonium oxalate, ammonium tartarate, ammonium citrate, and ammonium acetate may be used.