The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Jul. 13, 2009
Takashi Hiroi, Yokohama, JP;
Takeyuki Yoshida, Hitachinaka, JP;
Naoki Hosoya, Tokyo, JP;
Toshifumi Honda, Yokohama, JP;
Takashi Hiroi, Yokohama, JP;
Takeyuki Yoshida, Hitachinaka, JP;
Naoki Hosoya, Tokyo, JP;
Toshifumi Honda, Yokohama, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
Provided is an examination technique to detect defects with high sensitivity at an outer-most repetitive portion of a memory mat of a semiconductor device and even in a peripheral circuit having no repetitiveness. A circuit pattern inspection apparatus comprises an image detection unit for acquiring an image of a circuit pattern composed of multiple die having a repetitive pattern, a defect judgment unit which composes, in respect of an acquired detected image, reference images by switching addition objectives depending on regions of repetitive pattern and the other regions and compares a composed reference image with the detected image to detect a defect, and a display unit for displaying the image of the detected defect.