The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Aug. 20, 2009
Arjan Hubrecht Josef Anna Martens, Valkenburg, NL;
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Pieter Jacob Kramer, Veldhoven, NL;
Hubertus Leonardus Franciscus Heusschen, Eindhoven, NL;
Arjan Hubrecht Josef Anna Martens, Valkenburg, NL;
Martinus Cornelis Maria Verhagen, Valkenswaard, NL;
Pieter Jacob Kramer, Veldhoven, NL;
Hubertus Leonardus Franciscus Heusschen, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A temperature sensor is provided to measure the temperature of immersion liquid at a position where the immersion liquid is supplied. The reading of this temperature sensor is used to control the magnitude of heat input to the immersion liquid using a heater and/or cooler. A controller is used to calculate the calibration error of the temperature sensor relative to a temperature sensor that is provided upstream. The controller uses readings of the temperature difference between the two temperature sensors at one or more mass flow rates in order to estimate the temperature difference between the two temperature sensors at an infinite mass flow rate. The temperature difference at this infinite mass flow rate is estimated to be the temperature calibration error of the temperature sensor to measure the temperature of immersion liquid at a position where the immersion liquid is supplied relative to the upstream temperature sensor.