The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 13, 2013
Filed:
Jun. 03, 2011
Anthony Mowry, Buda, TX (US);
Markus Lenski, Dresden, DE;
Guido Koerner, Dresden, DE;
Ralf Otterbach, Dresden, DE;
Anthony Mowry, Buda, TX (US);
Markus Lenski, Dresden, DE;
Guido Koerner, Dresden, DE;
Ralf Otterbach, Dresden, DE;
GLOBALFOUNDRIES Inc., Grand Cayman, KY;
Abstract
By selectively modifying the spacer width, for instance, by reducing the spacer width on the basis of implantation masks, an individual adaptation of dopant profiles may be achieved without unduly contributing to the overall process complexity. For example, in sophisticated integrated circuits, the performance of transistors of the same or different conductivity type may be individually adjusted by providing different sidewall spacer widths on the basis of an appropriate masking regime.