The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2013
Filed:
Dec. 18, 2009
Henricus Johannes Lambertus Megens, Waalre, NL;
Johannes Anna Quaedackers, Veldhoven, NL;
Christian Marinus Leewis, Maastricht, NL;
Peter Clement Paul Vanoppen, Hechtel-Eksel, BE;
Henricus Johannes Lambertus Megens, Waalre, NL;
Johannes Anna Quaedackers, Veldhoven, NL;
Christian Marinus Leewis, Maastricht, NL;
Peter Clement Paul Vanoppen, Hechtel-Eksel, BE;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A plurality of targets including a second population superimposed on a first population are formed. In the first target the second population has an asymmetry with respect to the first population. In the second target the second population has a different asymmetry with respect to the first population. Reflected radiation is detected from both the targets and used to determine different characteristics of the underlying populations.