The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Oct. 22, 2008
Yoshinori Hayashi, Yokohama, JP;
Hiroshi Wakaba, Yokohama, JP;
Yoko Ono, Yokohama, JP;
Koichi Miyazono, Yokohama, JP;
Masao Kawamura, Yokohama, JP;
Hideki Mori, Yokohama, JP;
Yoshinori Hayashi, Yokohama, JP;
Hiroshi Wakaba, Yokohama, JP;
Yoko Ono, Yokohama, JP;
Koichi Miyazono, Yokohama, JP;
Masao Kawamura, Yokohama, JP;
Hideki Mori, Yokohama, JP;
Shibaura Mechatronics Corporation, Yokohama-shi, JP;
Abstract
A method of inspection and inspection apparatus able to use a captured image to more precisely inspect the state of film, defect parts, etc. at a surface of an object under inspection are provided. A method of inspection and inspection apparatus illuminating a surface of an object under inspectionby white light from an illumination unit Lwhile scanning the surface of the object under inspectionby an image capturing unitto acquire a captured image and using the captured image to inspect a state of the surface of the object under inspection, which changes a state of polarization of light Lstriking the image capturing unitfrom an illuminated location of the object under inspectionand obtains a plurality of captured images based on light of different polarization states LR striking the image capturing unit