The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Oct. 06, 2009
Wilhelmus Maria Corbeij, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Everhardus Cornelis Mos, Best, NL;
Wilhelmus Maria Corbeij, Eindhoven, NL;
Arie Jeffrey Den Boef, Waalre, NL;
Everhardus Cornelis Mos, Best, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method and apparatus for measurement of a characteristic of a substrate. A target is present on the substrate and a measurement is performed during a scanning movement of the substrate. The scanning movement of the substrate is a linear movement and the measurement includes obtaining a reflected image of the target using a pulsed light source, the duration of a single light pulse being less than 100 psec. A lithographic apparatus includes such a measurement apparatus, and a device manufacturing method includes such a measurement method.