The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2013
Filed:
Jun. 10, 2004
Kazuhiko Sugiyama, Nirasaki, JP;
Nobukazu Ikeda, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Toyomi Uenoyama, Osaka, JP;
Kazuhiko Sugiyama, Nirasaki, JP;
Nobukazu Ikeda, Osaka, JP;
Kouji Nishino, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Toyomi Uenoyama, Osaka, JP;
Fujikin Incorporated, Osaka, JP;
Tokyo Electron Ltd., Tokyo, JP;
Abstract
The invention supplies a quantity Q of gas while dividing at flow rate ratio Q/Qfrom a gas supply facility equipped with a flow controller. A total quantity Q=Q+Qof gas is supplied into a chamber at flow rate Qand Qthrough shower plates fixed to ends of branch supply lines by providing open/close valves with a plurality of branch supply lines GLand GL, respectively, to supply the specified quantity of gas from the gas supply facility, and by utilizing bypass line BLon the downstream side of the open/close valve OVand branched from GL,bypass line BLon the downstream side of the open/close valve OVand branched from GL,pressure type division quantity controller connected to the bypass line BLand the bypass line BL,a sensor measuring pressure inside branch supply line GL,and another sensor measuring pressure inside branch supply line GL