The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2013
Filed:
Sep. 17, 2008
Yuji Kamikawa, Koshi, JP;
Shigenori Kitahara, Koshi, JP;
Yuji Kamikawa, Koshi, JP;
Shigenori Kitahara, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A liquid processing apparatus includes: a processing partconfigured to process an object to be processed by a process liquid; a supply pathconnected to the processing partthe supply pathbeing configured to guide the process liquid to the processing parta solvent supply partconfigured to supply a solvent to the supply pathand a chemical-liquid supply partconfigured to supply a chemical liquid to the supply paththrough a chemical-liquid supply path so as to generate a chemical liquid diluted with the solvent. A measuring partwhich is configured to measure a conductivity of the chemical liquid diluted with the solvent, is disposed in the supply path at a position downstream from a connection points, to which the chemical-liquid supply pathis connected. An additional chemical-liquid supply part, which is configured to supply an additional chemical liquid different from the chemical liquid through an additional chemical-liquid supply path, is connected to the supply path at a position downstream from a measuring pointon which the measuring partis disposed.