The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Nov. 11, 2008
Applicants:
Yuya Inoue, Chigasaki, JP;
Hisato Tanaka, Chigasaki, JP;
Tamotsu Tanifuji, Chigasaki, JP;
Inventors:
Assignee:
Ulvac, Inc., Chigasaki-Shi, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B23B 1/25 (2006.01);
U.S. Cl.
CPC ...
Abstract
A movable table, which has a substrate to be processed mounted thereon and moves, includes: a main plate formed of a metallic material; and a plurality of sub plates which is disposed on the main plate and is formed of a material with a hardness higher than the metallic material, and the top surfaces of the plurality of sub plates are mounting surfaces of the substrate to be processed.
Inoue, Yuya. (2013). Movable table and processing stage (U.S. Patent No. 8485507). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8485507
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile