The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Oct. 03, 2008
Sachio Uto, Yokohama, JP;
Hidetoshi Nishiyama, Hitachinaka, JP;
Minori Noguchi, Joso, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
An aspect of the invention provides a defect inspection apparatus being able to accurately inspect a micro foreign matter or defect at a high speed for an inspection target substrate in which a repetitive pattern and a non-repetitive pattern are mixed. In a foreign matter anti-adhesive means, a transparent plateis placed on a placement tablethrough a frame. In the foreign matter anti-adhesive means, a shaftwhich is rotatably supported by two columnar supportsfixed onto a baseis coupled to a motorby a coupling. The shaftis inserted into a part of a framebetween the two columnar supportssuch that the frameand the transparent plateare turnable about the shaft. Therefore, the whole of the frameis opened and closed in a Z-direction about the shaft, and a waferon the placement tablecan be covered with the frameand the transparent plate