The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Nov. 05, 2007
Hiroshi Someya, Hiratsuka, JP;
Tamotsu Abe, Odawara, JP;
Takashi Suganuma, Ooiso, JP;
Hideo Hoshino, Hiratsuka, JP;
Akira Sumitani, Isehara, JP;
Hiroshi Someya, Hiratsuka, JP;
Tamotsu Abe, Odawara, JP;
Takashi Suganuma, Ooiso, JP;
Hideo Hoshino, Hiratsuka, JP;
Akira Sumitani, Isehara, JP;
Gigaphoton Inc., Tochigi, JP;
Abstract
A collector mirror exchanging apparatus is capable of safely and easily exchanging a collector mirror for collecting extreme ultra violet light emitted from plasma generated within a chamber of an extreme ultra violet light source apparatus. The collector mirror exchanging apparatus includes: a supporting base for supporting a collector mirror or a collector mirror structure; and a guiding rail disposed on the supporting base and regulating a moving direction of the collector mirror or the collector mirror structure; wherein at least the collector mirror is taken out of the chamber by moving the collector mirror or the collector mirror structure along the guiding rail on the supporting base.