The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Jun. 29, 2012
Gerd Benner, Aalen, DE;
Stefan Meyer, Aalen, DE;
Steffen Niederberger, Gerstetten, DE;
Dirk Preikszas, Oberkochen, DE;
Gerd Benner, Aalen, DE;
Stefan Meyer, Aalen, DE;
Steffen Niederberger, Gerstetten, DE;
Dirk Preikszas, Oberkochen, DE;
Carl Zeiss Microscopy GmbH, Jena, DE;
Abstract
A particle beam microscope comprises a magnetic lenshaving an optical axisand a pole piece. An objectto be examined is mounted at a point of intersectionbetween an optical axisand the object plane. First and second X-ray detectorshave first and second radiation-sensitive substratesarranged such that a first elevation angle βbetween a first straight lineextending through the point of intersectionand a center of the first substrateand the object planediffers from a second elevation angle βbetween a second straight lineextending through the point of intersectionand a center of the second substrateand the object planeby more than 14°.