The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Mar. 22, 2010
Douglas M Trickett, Altamont, NY (US);
Atsushi Yamashita, Albany, NY (US);
Douglas M Trickett, Altamont, NY (US);
Atsushi Yamashita, Albany, NY (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A method is provided for thinning a wafer, for example a wafer containing Through Silicon Vias (TSV). The method includes providing a bonding wafer coupled to a handling wafer, and performing a wafer edge trimming process that forms a trimmed bonding wafer, where the wafer edge trimming process removes an edge portion of the bonding wafer and exposes an upper surface of the handling wafer. The method further includes forming a protective mask on the trimmed bonding wafer and on the exposed upper surface of the handling wafer, planarizing the protective mask and the trimmed bonding wafer, and selectively removing the planarized protective mask by an etching process. In one embodiment, the removing includes performing a first wet etching process that selectively removes a portion of the planarized trimmed bonding wafer relative to the planarized protective mask, and performing a second wet etching process that selectively removes the planarized protective mask.