The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 29, 2010
Luc Albarede, Fremont, CA (US);
Eric Pape, Newark, CA (US);
Vijayakumar C Venugopal, Berkeley, CA (US);
Brian D Choi, San Jose, CA (US);
Luc Albarede, Fremont, CA (US);
Eric Pape, Newark, CA (US);
Vijayakumar C Venugopal, Berkeley, CA (US);
Brian D Choi, San Jose, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A method for assessing health status of a processing chamber is provided. The method includes executing a recipe. The method also includes receiving processing data from a set of sensors during execution of the recipe. The method further includes analyzing the processing data utilizing a set of multi-variate predictive models. The method yet also includes generating a set of component wear data values. The method yet further includes comparing the set of component wear data values against a set of useful life threshold ranges. The method moreover includes generating a warning if the set of component wear data values is outside of the set of useful life threshold ranges.