The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 16, 2010
Kenichi Washio, Tokyo, JP;
Katsuo Yasuta, Tokyo, JP;
Umenori Sugiyama, Tokyo, JP;
Hikaru Masuta, Tokyo, JP;
Kenichi Washio, Tokyo, JP;
Katsuo Yasuta, Tokyo, JP;
Umenori Sugiyama, Tokyo, JP;
Hikaru Masuta, Tokyo, JP;
Kabushiki Kaisha Nihon Micronics, Tokyo, JP;
Abstract
A wafer prober is provided with a tray which supports a wafer at a set position, transports it to a processing position of the wafer and is placed at the processing position; one or more alignment units which position the wafer at the set position with respect to the tray; contact units arranged in number larger than that of the alignment units and performing inspection processing in contact with the wafer at the processing position; and a tray transport portion for transporting the tray supporting the wafer between the alignment unit and the contact unit. The tray is provided with three or more pin holes for allowing movement of the chuck pin in the XYZθ directions, an alignment mark for positioning the wafer, and an alignment portion for positioning the tray itself.