The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 23, 2009
Naoki Morimoto, Shizuoka, JP;
Tomoyasu Kondo, Shizuoka, JP;
Daisuke Mori, Shizuoka, JP;
Kyuzo Nakamura, Kanagawa, JP;
Naoki Morimoto, Shizuoka, JP;
Tomoyasu Kondo, Shizuoka, JP;
Daisuke Mori, Shizuoka, JP;
Kyuzo Nakamura, Kanagawa, JP;
Ulvac, Inc., Kanagawa, JP;
Abstract
There is provided an inexpensive cathode unit which is simple in construction and is capable of forming a film at good coating characteristics relative to each of micropores of high aspect ratio throughout an entire surface of a substrate. There is also provided a sputtering apparatus provided with the cathode unit. The cathode unit of this invention has a holder formed with one or more recessed portions on one surface thereof. Inside the recessed portions there are mounted bottomed cylindrical target members from the bottom side thereof. Into a space inside each of the target members there are built magnetic field generating means for generating magnetic fields.