The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jan. 06, 2011
Anthony DE LA Llera, Fremont, CA (US);
Pratik Mankidy, Fremont, CA (US);
Rajlnder Dhindsa, San Jose, CA (US);
Michael C. Kellogg, Oakland, CA (US);
Gregory R. Bettencourt, Fremont, CA (US);
Roger Patrick, Mountain View, CA (US);
Anthony de la Llera, Fremont, CA (US);
Pratik Mankidy, Fremont, CA (US);
Rajlnder Dhindsa, San Jose, CA (US);
Michael C. Kellogg, Oakland, CA (US);
Gregory R. Bettencourt, Fremont, CA (US);
Roger Patrick, Mountain View, CA (US);
Lam Research Corporation, Fremont, CA (US);
Abstract
A showerhead electrode and assembly useful for plasma etching includes cam locks which provide improved thermal contact between the showerhead electrode and a backing plate. The cam locks include cam shafts in the backing plate which engage enlarged heads of studs mounted on the showerhead electrode. The assembly can include an annular shroud surrounding the showerhead electrode and eight of the cam shafts in the backing plate can be operated such that each cam shaft simultaneously engages a stud on the annular shroud and a stud in an outer row of studs on the showerhead electrode. Another eight cam shafts can be operated such that each cam shaft engages a pair of studs on inner and middle rows of the studs mounted of the showerhead electrode.