The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2013

Filed:

Aug. 24, 2010
Applicants:

Eric Endres, Issaquah, WA (US);

John T. Strom, North Bend, WA (US);

Christian Kuwasaki, Sammamish, WA (US);

Christopher Mclaughlin, Minneapolis, MN (US);

Inventors:

Eric Endres, Issaquah, WA (US);

John T. Strom, North Bend, WA (US);

Christian Kuwasaki, Sammamish, WA (US);

Christopher McLaughlin, Minneapolis, MN (US);

Assignee:

Rudolph Technologies, Inc., Flanders, NJ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system and method for evaluating wafer test probe cards under real-world wafer test cell condition integrates wafer test cell components into the probe card inspection and analysis process. Disclosed embodiments may utilize existing and/or modified wafer test cell components such as, a head plate, a test head, a signal delivery system, and a manipulator to emulate wafer test cell dynamics during the probe card inspection and analysis process.


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