The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 18, 2013

Filed:

Jul. 31, 2008
Applicants:

Takeshi Segawa, Saitama, JP;

Kiyofumi Tanaka, Kita-Adachi-gun, JP;

Inventors:

Takeshi Segawa, Saitama, JP;

Kiyofumi Tanaka, Kita-Adachi-gun, JP;

Assignees:

Lintec Corporation, Tokyo, JP;

Shin-Etsu Polymer, Tokyo, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/683 (2006.01); B25B 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A fixing jig is made up of a plate-like jig main body () and a close contact layer () which detachably holds a work (W) in close contact therewith. The jig main body has: on one surface thereof a plurality of supporting projections () to support the close contact layer; and also has, along an outer peripheral portion of said one surface, a side wall () which is of substantially the same height as the supporting projections. The close contact layer is adhered to an end surface of the side wall to thereby define a partitioned space () between the close contact layer and the jig main body. By sucking the air within the partitioned space via a ventilation hole () formed in the jig main body, the close contact layer is deformed. The work is thus surely supported and fixed also in performing a processing in which a force is applied to the work. The jig main body () has formed therein a suction hole () which opens into an outer surface on the side of the close contact layer () but which is not communicated with the partitioned space (). A through hole () in communication with the suction hole () is formed in the close contact layer (). A suction force is applied to the work W by evacuation of the suction hole ().


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