The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jun. 18, 2010
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Hans Jansen, Eindhoven, NL;
Jeroen Peter Johannes Bruijstens, Eindhoven, NL;
Ivo Adam Johannes Thomas, Son, NL;
Gerardus Adrianus Antonius Maria Kusters, Eindhoven, NL;
Marcio Alexandre Cano Miranda, Eindhoven, NL;
Gheorghe Tanasa, Eindhoven, NL;
Johannes Henricus Wilhelmus Jacobs, Heeze, NL;
Hans Jansen, Eindhoven, NL;
Jeroen Peter Johannes Bruijstens, Eindhoven, NL;
Ivo Adam Johannes Thomas, Son, NL;
Gerardus Adrianus Antonius Maria Kusters, Eindhoven, NL;
Marcio Alexandre Cano Miranda, Eindhoven, NL;
Gheorghe Tanasa, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
An immersion lithographic apparatus comprising a surface which is curved such that a surface-tension drainage force acts in a direction on a film of immersion liquid on the surface.