The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Feb. 29, 2012
Applicants:
Meng-wei Chen, Taichung, TW;
Chi-chuang Lee, Chubei, TW;
Chung-hsien Lin, Hsinchu, TW;
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
An integrated circuit device includes a semiconductor substrate having a device region and an alignment region. A first material layer is disposed over the semiconductor substrate, and includes a device feature in the device region and a dummy feature in the alignment region. A dimension of the dummy feature is less than a dimension of an alignment detector. A second material layer is disposed over the semiconductor substrate, and includes an alignment feature in the alignment region. The alignment feature disposed over the dummy feature.