The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Jun. 25, 2012
Khashayar Shadman, Mountain View, CA (US);
Robert G. Haynes, Pleasanton, CA (US);
Christopher Malcolm Stanley Sears, Fremont, CA (US);
Mehran Nasser-ghodsi, Hamilton, MA (US);
Khashayar Shadman, Mountain View, CA (US);
Robert G. Haynes, Pleasanton, CA (US);
Christopher Malcolm Stanley Sears, Fremont, CA (US);
Mehran Nasser-Ghodsi, Hamilton, MA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
One embodiment disclosed relates an apparatus which includes an electromagnet arranged to provide a large-scale magnetic field in a region. The apparatus further includes an array of multiple electron beam columns formed in the region using an array of bores through magnetic material. Another embodiment relates to a method of generating an array of electron beams. A large-scale magnetic field is generated in a region using at least two magnetic poles. The array of electron beams is generated using an array of columns formed using bores through a magnetic material positioned in the region. Other embodiments, aspects and features are also disclosed.