The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Sep. 25, 2007
Anthony Zampini, Westborough, MA (US);
Michael K. Gallagher, Hopkinton, MA (US);
Vipul Jain, Marlborough, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Anthony Zampini, Westborough, MA (US);
Michael K. Gallagher, Hopkinton, MA (US);
Vipul Jain, Marlborough, MA (US);
Owendi Ongayi, Marlborough, MA (US);
Rohm and Haas Electronic Materials LLP, Marlborough, MA (US);
Abstract
Underlying coating compositions are provided that comprise one or more resins comprising one or more modified imide groups. These coating compositions are particularly useful as antireflective layers for an overcoated photoresist layer. Preferred systems can be thermally treated to increase hydrophilicity of the composition coating layer to inhibit undesired intermixing with an overcoated organic composition layer, while rendering the composition coating layer removable with aqueous alkaline photoresist developer.