The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Jun. 22, 2010
Applicants:
Pieter Jacob Kramer, Veldhoven, NL;
Antonius Johannus Van Der Net, Tilburg, NL;
Erik Henricus Egidius Catharina Eummelen, Eindhoven, NL;
Anthonie Kuijper, Best, NL;
Inventors:
Pieter Jacob Kramer, Veldhoven, NL;
Antonius Johannus Van Der Net, Tilburg, NL;
Erik Henricus Egidius Catharina Eummelen, Eindhoven, NL;
Anthonie Kuijper, Best, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
A lithographic apparatus is disclosed that includes a conduit for two phase flow therethrough. A flow separator is provided to separate the two phase flow into a gas flow and a liquid flow. A flow meter measures the flow rate of fluid in the gas flow or the liquid flow.