The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Jun. 25, 2009
Applicants:
Jung-hyun Lee, Suwon-si, KR;
Jong-min Kim, Suwon-si, KR;
Dong-joon MA, Anyang-si, KR;
Chang-soo Lee, Suwon-si, KR;
Inventors:
Jung-hyun Lee, Suwon-si, KR;
Jong-min Kim, Suwon-si, KR;
Dong-joon Ma, Anyang-si, KR;
Chang-soo Lee, Suwon-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/428 (2006.01); H01L 21/477 (2006.01);
U.S. Cl.
CPC ...
Abstract
Electron beam annealing apparatuses for annealing a thin layer on a substrate and annealing methods using the apparatuses are provided. The electron beam annealing apparatuses may include an electron beam scanning unit that may scan a pulsed electron beam onto a substrate.