The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Nov. 03, 2009
Applicants:
Hong-ji Lee, Taoyuan, TW;
Nan-tsu Lian, Hsunchu, TW;
Kuang-chao Chen, Hsinchu, TW;
Inventors:
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/8247 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method of fabricating a memory device includes providing a substrate having an insulating layer, forming first, second, and third conductive layers on the insulating layer, forming a mask on the third conductive layer, etching through the third conductive layer and a first portion thickness of the second conductive layer using the mask to provide an etched sidewall portions of the third conductive layer and an etched upper surface of the second polysilicon layer, and forming a liner layer along the etched sidewall portions and the etched upper surface.