The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Jun. 22, 2010
Masahiro Nakaharada, Koshi, JP;
Naruaki Iida, Koshi, JP;
Katsuhiro Morikawa, Koshi, JP;
Suguru Enokida, Koshi, JP;
Masahiro Nakaharada, Koshi, JP;
Naruaki Iida, Koshi, JP;
Katsuhiro Morikawa, Koshi, JP;
Suguru Enokida, Koshi, JP;
Tokyo Electron Limited, Minato-Ku, JP;
Abstract
A substrate transfer apparatus, for transferring a substrate from a first module to a second module, includes a moving base having a Y-motion axis for moving the moving base in Y-direction, and a substrate holding member mounted to the moving base via X-motion axis so as to move relative to the moving base to be in an advanced position and a retracted position relative to the moving base. The X-motion axis operates when the Y-motion axis is operating, if the X-motion axis must be parallel to the Y-motion axis when transferring the substrate from the substrate holding member to the second module.