The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Apr. 11, 2011
Applicants:
Ronald Van Der Ham, Maarheeze, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Herman Vogel, Sandy Hook, CT (US);
Niek Jacobus Johannes Roset, Eindhoven, NL;
Inventors:
Ronald Van Der Ham, Maarheeze, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Herman Vogel, Sandy Hook, CT (US);
Niek Jacobus Johannes Roset, Eindhoven, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F03B 11/02 (2006.01); F15B 13/00 (2006.01); F16L 3/01 (2006.01); G03B 27/52 (2006.01); G03B 27/32 (2006.01); G03B 27/42 (2006.01);
U.S. Cl.
CPC ...
Abstract
An assembly including a conditioning system and an object moveable into and/or out of an area to be conditioned is disclosed. The conditioning system has fluid outlet passages to supply conditioning fluid to the area to be conditioned and is configured to adjust outflow of the conditioning fluid from the fluid outlet passages depending on a position of the object.