The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Nov. 19, 2009
William K. Hensen, Beacon, NY (US);
Michael D. Hulvey, Shelburne, VT (US);
Amit Kumar, Williston, VT (US);
Jeanne-tania Sucharitaves, Bangkok, TH;
Amanda L. Tessier, Poughkeepsie, NY (US);
William K. Hensen, Beacon, NY (US);
Michael D. Hulvey, Shelburne, VT (US);
Amit Kumar, Williston, VT (US);
Jeanne-Tania Sucharitaves, Bangkok, TH;
Amanda L. Tessier, Poughkeepsie, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method of automated generation of oxide pillar (PX) slot shapes of a PX layer within silicon-on-insulator (SOI) structures that includes generating a placement grid on recess oxide (RX) shapes, creating PX placement markers on the placement grid along a perimeter of the RX shapes, filtering the PX placement markers, generating a PX slot shape corresponding to each filtered PX placement marker on the RX shapes, correcting location errors associated with the generated PX slot shapes, generating PX slot shapes on RX shapes of a predetermined size for which PX slot shapes were not generated, performing a verification operation of the PX slot shapes, and outputting the PX layer including the verified PX slot shapes.