The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Apr. 07, 2011
Guoheng Zhao, Milpitas, CA (US);
Ady Levy, Sunnyvale, CA (US);
Alex Salnik, San Jose, CA (US);
Mehdi Vaez-iravani, Los Gatos, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Samuel S. H. Ngai, San Francisco, CA (US);
Guoheng Zhao, Milpitas, CA (US);
Ady Levy, Sunnyvale, CA (US);
Alex Salnik, San Jose, CA (US);
Mehdi Vaez-Iravani, Los Gatos, CA (US);
Lena Nicolaides, Castro Valley, CA (US);
Samuel S. H. Ngai, San Francisco, CA (US);
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.